Profilometer DektakXT

The DektakXT (Bruker) is a tactile surface profilometer for the measurement of surface topography in a wide range of applications including determination of the layer thickness of metallic, organic or dielectric films. It allows for extraction of surface (line)-profiles with resolutions below 1 nm (vertical) and 4 µm (lateral), respectively. Depending on the chosen resolution up to 1 mm high features can be measured. The software also enables measurement of 3D topography through repeated line traces.